INVESTIGATION OF MULTILAYER SYSTEMS BY THE SCRATCH METHOD

被引：2

作者：

ELSHABASY, M

SZIKORA, B

PETO, G

SZABO, I

MITTAL, KL

机构：

[1] CENT RES INST PHYS,H-1525 BUDAPEST,HUNGARY

[2] IBM CORP,E FISHKILL FACIL,HOPEWELL JUNCTION,NY 12533

来源：

THIN SOLID FILMS | 1983年 / 109卷 / 02期

关键词：

D O I：

10.1016/0040-6090(83)90132-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：127 / 136

页数：10

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[10] ADHESION MEASUREMENT OF THIN-FILMS [J].

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