THICKNESS DISTRIBUTION OF FILMS FABRICATED BY THE MOLECULAR-BEAM EPITAXY TECHNIQUE

被引：14

作者：

NANBU, K

WATANABE, Y

机构：

[1] Tohoku Univ, Sendai, Jpn, Tohoku Univ, Sendai, Jpn

来源：

VACUUM | 1986年 / 36卷 / 06期

关键词：

D O I：

10.1016/0042-207X(86)90016-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：349 / 354

页数：6

共 10 条

[1]

BIRD GA, 1976, MOL GAS DYNAMICS, P100

[2]

DEPPISCH G, 1981, VAKUUM-TECH, V30, P67

[3] EFFUSION OF GASES THROUGH CONICAL ORIFICES [J].

ICZKOWSKI, RP ;

MARGRAVE, JL ;

ROBINSON, SM .

JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (02) :229-&

[4] MOLECULAR-BEAM DISTRIBUTIONS FROM HIGH-RATE SOURCES [J].

JACKSON, SC ;

BARON, BN ;

ROCHELEAU, RE ;

RUSSELL, TWF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :1916-1920

[5] ANGULAR-DISTRIBUTIONS OF MOLECULAR FLUX FROM ORIFICES OF VARIOUS THICKNESSES [J].

NANBU, K .

VACUUM, 1985, 35 (12) :573-576

[6] LARGE-AREA UNIFORM EVAPORATED THIN-FILMS [J].

RAMSAY, JV ;

NETTERFIELD, RP ;

MUGRIDGE, EG .

VACUUM, 1974, 24 (08) :337-340

[7]

REYNOLDS TW, 1967, NASA R255 TECH REP

[8]

RICHLEY EA, 1964, NASA D2330 TECH NOT

[9] FILM THICKNESS DISTRIBUTION AT OBLIQUE EVAPORATION [J].

SVENSSON, SP ;

ANDERSSON, TG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (02) :245-247

[10] TRANSFORMATION BETWEEN PERPENDICULAR AND OBLIQUE-INCIDENCE AT EVAPORATION [J].

SVENSSON, SP ;

ANDERSSON, TG .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1981, 14 (09) :1076-1077

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