FORMATION OF CUXMO6S8-Y THIN-FILM ON AN MOS2 SUBSTRATE BY A CHEMICAL-TRANSPORT TECHNIQUE

被引:5
作者
HINODE, H
YAMAMOTO, S
WAKIHARA, M
TANIGUCHI, M
机构
[1] Tokyo Inst of Technology, Dep of, Chemical Engineering, Tokyo, Jpn, Tokyo Inst of Technology, Dep of Chemical Engineering, Tokyo, Jpn
关键词
D O I
10.1016/0025-5408(85)90138-2
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
13
引用
收藏
页码:611 / 617
页数:7
相关论文
共 13 条
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