3-ANODE ACCELERATING LENS SYSTEM FOR FIELD-EMISSION SCANNING ELECTRON-MICROSCOPE

被引：22

作者：

KURODA, K ^{[1
]}

EBISUI, H ^{[1
]}

SUZUKI, T ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL PHYS,YAMADA,OSAKA,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 05期

关键词：

D O I：

10.1063/1.1663587

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2336 / 2342

页数：7

共 12 条

[1]

Butler, 1966, 6TH P INT C EL MICR, V1, P191

[2] A SCANNING MICROSCOPE WITH 5 A RESOLUTION [J].

CREWE, AV ;

WALL, J .

JOURNAL OF MOLECULAR BIOLOGY, 1970, 48 (03) :375-&

[3] ELECTRON GUN USING A FIELD EMISSION SOURCE [J].

CREWE, AV ;

EGGENBER.DN ;

WALL, J ;

WELTER, LM .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1968, 39 (04) :576-&

[4]

ELKAREH AB, 1970, ELECTRON BEAMS LENSE

[5]

FRASER DL, 1971, 11TH S EL ION LAS BE, P209

[6]

KOMODA T, 1972, SCANNING ELECTRON MI

[7] APERTURE EFFECT OF ELECTROSTATIC LENSES [J].

KURODA, K ;

SUZUKI, T .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1972, 11 (08) :1222-&

[8]

KURODA K, TO BE PUBLISHED

[9]

MUNRO E, 1972, 5TH P EUR C EL MICR, P22

[10]

PLOMB FH, 1968, 4 EUR REG C EL MICR, V1, P141

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