NON-DESTRUCTIVE INTERFEROMETRIC DETECTION OF UNBONDED LAYERS

被引：5

作者：

CIELO, P ^{[1
]}

ROUSSET, G ^{[1
]}

BERTRAND, L ^{[1
]}

机构：

[1] ECOLE POLYTECH,MONTREAL H3C 3A7,QUEBEC,CANADA

来源：

OPTICS AND LASERS IN ENGINEERING | 1984年 / 5卷 / 04期

关键词：

D O I：

10.1016/0143-8166(84)90002-2

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：231 / 248

页数：18

共 18 条

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