TONKS-LANGMUIR PROBLEM FOR A BI-MAXWELLIAN PLASMA

被引:74
作者
GODYAK, VA
MEYTLIS, VP
STRAUSS, HR
机构
[1] OSRAM SYLVANIA INC,DANVERS,MA 01923
[2] NYU,COURANT INST MATH SCI,NEW YORK,NY 10012
关键词
D O I
10.1109/27.467995
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
An analytical solution of the Tonks-Langmuir (T-L) problem with a bi-Maxwellian electron energy distribution function (EEDF) is obtained for a plasma slab, The solution shows that the ambipolar potential; the plasma density distribution, and the ion flux to the wall are mainly governed by the cold electrons, while the ionization rate and voltage drop across the waif sheath are governed by the hot electrons. The ionization rate by direct electron impact is found to be spatially rather uniform, contrary td the T-L solution where it is proportional to the plasma density distribution, The temperature of hot electrons defined by the ionization balance is found to be close to that of the T-L solution for a mono-Maxwellian EEDF, and is in reasonable agreement with experiments carried out in a low pressure capacitance RF discharge, The energy balance for cold electrons in this discharge shows that their heating by hot electrons via Coulomb interaction is equalized by the cold electrons' escape to the RF electrodes during collapse of the RF sheath.
引用
收藏
页码:728 / 734
页数:7
相关论文
共 33 条
[1]   ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].
BERNSTEIN, IB ;
HOLSTEIN, T .
PHYSICAL REVIEW, 1954, 94 (06) :1475-1482
[2]   BOHM VELOCITY WITH A 2-TEMPERATURE DISTRIBUTION OF NEGATIVE PARTICLES [J].
BOSWELL, RW ;
LICHTENBERG, AJ ;
VENDER, D .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1992, 20 (02) :62-65
[3]  
Chen F.F., 1974, INTRO PLASMA PHYS, P8
[4]  
Godyak V. A., 1979, Soviet Physics - Technical Physics, V24, P1255
[5]   Measurements of electron energy distribution in low-pressure RF discharges [J].
Godyak, V. A. ;
Piejak, R. B. ;
Alexandrovich, B. M. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) :36-58
[6]   PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE [J].
GODYAK, VA ;
PIEJAK, RB .
APPLIED PHYSICS LETTERS, 1993, 63 (23) :3137-3139
[7]   ABNORMALLY LOW ELECTRON-ENERGY AND HEATING-MODE TRANSITION IN A LOW-PRESSURE ARGON RF DISCHARGE AT 13.56 MHZ [J].
GODYAK, VA ;
PIEJAK, RB .
PHYSICAL REVIEW LETTERS, 1990, 65 (08) :996-999
[8]   PROBE DIAGNOSTICS OF NON-MAXWELLIAN PLASMAS [J].
GODYAK, VA ;
PIEJAK, RB ;
ALEXANDROVICH, BM .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (08) :3657-3663
[9]  
GODYAK VA, 1979, ZH TEKH FIZ+, V49, P2265
[10]  
GODYAK VA, 1990, P ESCAMPIG 90, P415