PARADOXICAL SPATIAL-DISTRIBUTION OF THE ELECTRON-TEMPERATURE IN A LOW-PRESSURE RF DISCHARGE

被引：94

作者：

GODYAK, VA

PIEJAK, RB

机构：

[1] Osram Sylvania Inc., Danvers

来源：

APPLIED PHYSICS LETTERS | 1993年 / 63卷 / 23期

关键词：

D O I：

10.1063/1.110227

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Spatially resolved probe measurements of the electron energy distribution function (EEDF) in a capacitive rf discharge in argon reveal that the electron temperature decreases with increasing plasma heating rf field. This paradoxical behavior in the electron temperature distribution in an inhomogeneous rf field is shown to be the combined effect of nonlocal electron kinetics and a non-Maxwellian EEDF typical of a low pressure capacitive rf discharge in a Ramsauer gas.

引用

收藏

页码：3137 / 3139

页数：3

相关论文

共 15 条

[1] PHYSICAL-PROPERTIES OF A TRANSVERSE HIGH-FREQUENCY GAS-DISCHARGE .1. BASIC PROPERTIES AND PHYSICAL MODEL OF THE DISCHARGE [J].

ABRAMOV, VP ;

KERNER, BS ;

KLENOV, SL .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1992, 25 (10) :1454-1460

[2] ELECTRON DENSITY DISTRIBUTION IN A HIGH FREQUENCY DISCHARGE IN THE PRESENCE OF PLASMA RESONANCE [J].

ALLIS, WP ;

BROWN, SC ;

EVERHART, E .

PHYSICAL REVIEW, 1951, 84 (03) :519-522

[3] ELECTRON ENERGY DISTRIBUTIONS IN STATIONARY DISCHARGES [J].

BERNSTEIN, IB ;

HOLSTEIN, T .

PHYSICAL REVIEW, 1954, 94 (06) :1475-1482

[4] RF DISCHARGE MODELING CONSIDERING TIME-DEPENDENCE AND SPATIAL NONLOCALITY OF THE ELECTRON-ENERGY SPECTRUM [J].

FEOKTISTOV, VA ;

POPOV, AM ;

POPOVICHEVA, OB ;

RAKHIMOV, AT ;

RAKHIMOVA, TV ;

VOLKOVA, EA .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :163-169

[5] Measurements of electron energy distribution in low-pressure RF discharges [J].

Godyak, V. A. ;

Piejak, R. B. ;

Alexandrovich, B. M. .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1992, 1 (01) :36-58

[6] ABNORMALLY LOW ELECTRON-ENERGY AND HEATING-MODE TRANSITION IN A LOW-PRESSURE ARGON RF DISCHARGE AT 13.56 MHZ [J].

GODYAK, VA ;

PIEJAK, RB .

PHYSICAL REVIEW LETTERS, 1990, 65 (08) :996-999

[7]

GODYAK VA, 1988, PHYS REV A, V38, P2094

[8]

GODYAK VA, 1979, SOV J PLASMA PHYS, V5, P376

[9] RADIALLY DEPENDENT SOLUTIONS OF BOLTZMANN-EQUATION IN LOW-TEMPERATURE PLASMAS USING A MODIFIED 2-TERM EXPANSION [J].

HARTIG, MJ ;

KUSHNER, MJ .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (03) :1080-1090

[10]

HERMANN D, 1970, BEITR PLASMAPHYS, V10, P75