RF DISCHARGE MODELING CONSIDERING TIME-DEPENDENCE AND SPATIAL NONLOCALITY OF THE ELECTRON-ENERGY SPECTRUM

被引：28

作者：

FEOKTISTOV, VA

POPOV, AM

POPOVICHEVA, OB

RAKHIMOV, AT

RAKHIMOVA, TV

VOLKOVA, EA

机构：

[1] Research Institute of Nuclear Physics, Department of Microelectronics, Moscow State University, 119899, Moscow

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1991年 / 19卷 / 02期

关键词：

D O I：

10.1109/27.106810

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

RF discharge modeling in He is performed. New features of modeling are based on the solution of the nonstationary Boltzmann equation in the spatially nonuniform electric field, coupled with the equation for electric field and charged-particle densities. It is shown that the local equilibrium model for the electron energy spectrum in RF discharge is not valid for the pressure range congruent-to 10 torr.

引用

页码：163 / 169

页数：7

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