TIME-RESOLVED AND SPACE-RESOLVED SPECTROSCOPY OF ELECTRON-TRANSPORT IN LOW-FREQUENCY DISCHARGE PLASMA IN ARGON

被引：15

作者：

MAKABE, T

NAKAYA, M

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1987年 / 20卷 / 10期

关键词：

D O I：

10.1088/0022-3727/20/10/006

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1243 / 1249

页数：7

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