ION-IMPLANTATION OF LOW MELTING-POINT METALS INTO SAPPHIRE

被引：24

作者：

MOURITZ, AP

SOOD, DK

STJOHN, DH

SWAIN, MV

WILLIAMS, JS

机构：

[1] ROYAL MELBOURNE INST TECHNOL, CTR MICROELECTR TECHNOL, MELBOURNE, VIC 3001, AUSTRALIA

[2] CSIRO, DIV MAT SCI, CLAYTON, VIC 3168, AUSTRALIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80161-1

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：805 / 808

页数：4

共 18 条

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[9]

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