2-DIMENSIONAL DISTRIBUTIONS OF C-2, CH, AND OH IN A DIAMOND DEPOSITING OXYACETYLENE FLAME MEASURED BY LASER-INDUCED FLUORESCENCE

被引：49

作者：

KLEINDOUWEL, RJH

SPAANJAARS, JJL

TERMEULEN, JJ

机构：

[1] Department of Molecular and Laser Physics, University of Nijmegen, 6525 ED Nijmegen, Toernooiveld

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 78卷 / 03期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.360186

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Two-dimensional laser induced fluorescence measurements are applied to the chemical vapor deposition of diamond by an oxyacetylene flame. The fluorescence distributions of C-2, CH, and OH are measured for various deposition conditions. The influence of the temperature of the molybdenum substrate and the distance between the substrate and the flame front on the two-dimensional distributions and on the quality and morphology of the deposited diamond is investigated. A relation is observed between the C-2 distribution in the flame and the local growth rate and quality of the diamond layer, therefore C-2 is thought to be an important species for diamond growth. The exact role of CH as a growth species is less clear; OH seems to be of minor importance. All measurements are performed during diamond deposition. (C) 1995 American Institute of Physics.

引用

页码：2086 / 2096

页数：11

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[1] LASER-INDUCED FLUORESCENCE WITH TUNABLE EXCIMER LASERS AS A POSSIBLE METHOD FOR INSTANTANEOUS TEMPERATURE-FIELD MEASUREMENTS AT HIGH-PRESSURES - CHECKS WITH AN ATMOSPHERIC FLAME [J].