HYDROGEN SPUTTERING OF CARBON THIN-FILMS DEPOSITED ON PLATINUM

被引：17

作者：

SMITH, JN ^{[1
]}

MEYER, CH ^{[1
]}

LAYTON, JK ^{[1
]}

机构：

[1] GEN ATOM CO,SAN DIEGO,CA 92138

来源：

JOURNAL OF NUCLEAR MATERIALS | 1977年 / 67卷 / 1-2期

关键词：

D O I：

10.1016/0022-3115(77)90178-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：234 / 235

页数：2

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