PREPARATION OF MICROCOILED SI3N4 FIBERS BY IMPURITY METAL ACTIVATED CHEMICAL-VAPOR-DEPOSITION AND THEIR MECHANICAL-PROPERTIES

被引：47

作者：

MOTOJIMA, S

YAMANA, T

ARAKI, T

IWANAGA, H

机构：

[1] IWATANI INT CO LTD,DEPT BUSINESS DEV,CHUO KU,OSAKA 541,JAPAN

[2] NAGASAKI UNIV,FAC LIBERAL ARTS,NAGASAKI 852,JAPAN

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1995年 / 142卷 / 09期

关键词：

D O I：

10.1149/1.2048702

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

Microcoiled Si3N4 fibers have been prepared by the metal impurity activated chemical vapor deposition process using SiO-NH3-H-2-Ar gas mixtures. Growth conditions, microstructures, and mechanical properties of the Si3N4 coils were examined. Among the metal impurities used, Fe and Co were the most effective for growing coiled Si3N4 fibers. The coiled Si3N4 fibers were in amorphous state. The driving force of coiling or what affects the amorphous state during coiling is still unknown. The Si3N4 coils showed a maximum shear stress of about 12 GPa and the shear modulus of 110 GPa.

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页码：3141 / 3148

页数：8

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