CHARACTERIZATION OF A SADDLE-FIELD DISCHARGE GUN FOR FABMS USING DIFFERENT DISCHARGE VAPORS

被引:19
作者
ALEXANDER, AJ
HOGG, AM
机构
来源
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1986年 / 69卷 / 03期
关键词
D O I
10.1016/0168-1176(86)87021-5
中图分类号
O64 [物理化学(理论化学)、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号
070203 ; 070304 ; 081704 ; 1406 ;
摘要
引用
收藏
页码:297 / 311
页数:15
相关论文
共 16 条
[1]   PARTICLE-INDUCED DESORPTION MASS-SPECTROMETRY WITH A QUADRUPOLE MASS-SPECTROMETER [J].
FAULL, KF ;
TYLER, AN ;
SIM, H ;
BARCHAS, JD ;
MASSEY, IJ ;
KENYON, CN ;
GOODLEY, PC ;
MAHONEY, JF ;
PEREL, J .
ANALYTICAL CHEMISTRY, 1984, 56 (02) :308-311
[2]   A FAST-ATOM BEAM SPECTROMETER [J].
FITCH, RK ;
ALI, KS ;
INMAN, M .
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (11) :939-941
[3]   FAB - THE FAST ATOMIC-BEAM SOURCE [J].
FRANKS, J .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 46 (JAN) :343-346
[4]   SADDLE FIELD-ION SOURCE OF SPHERICAL CONFIGURATION FOR ETCHING AND THINNING APPLICATIONS [J].
FRANKS, J ;
GHANDER, AM .
VACUUM, 1974, 24 (10) :489-491
[5]   The relative secondary electron emission due to He, Ne, and A ions bombarding a hot nickel target [J].
Healea, M ;
Houtermans, C .
PHYSICAL REVIEW, 1940, 58 (07) :608-610
[6]   CONVERSION OF MASS SPECTROMETERS FOR FAST-ATOM BOMBARDMENT USING EASILY CONSTRUCTED COMPONENTS [J].
HOGG, AM .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1983, 49 (01) :25-34
[7]   CHARACTERIZATION OF THE XENON ION FLUX PRODUCED BY A SADDLE-FIELD NEUTRAL-BEAM SOURCE [J].
LIGON, WV .
INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1982, 41 (03) :205-208
[8]  
LIGON WV, 1985, COMMUNICATION
[9]   OPTIMIZATION OF EXPERIMENTAL PROCEDURES FOR FAST ATOM BOMBARDMENT MASS-SPECTROMETRY [J].
MARTIN, SA ;
COSTELLO, CE ;
BIEMANN, K .
ANALYTICAL CHEMISTRY, 1982, 54 (13) :2362-2368
[10]  
Pomathiod L., 1980, Low-Energy Ion Beams, 1980. Second International Conference on Low-Energy Ion Beams, P309