NITRIDING OF NIOBIUM AND TANTALUM WITH A PLASMA-JET UNDER REDUCED PRESSURE

被引：4

作者：

KOTAKI, T

MATSUMOTO, O

机构：

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 01期

关键词：

D O I：

10.1007/BF00573821

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：53 / 63

页数：11

共 19 条

[1] SPECTROSCOPIC INVESTIGATIONS OF HIGH-CURRENT HOLLOW-CATHODE DISCHARGES IN FLOWING NITROGEN AT LOW PRESSURES [J].

BLEEKRODE, R ;

VANBENTH.W .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (13) :5274-+

[2]

BOIKO LG, 1970, JETP LETT-USSR, V12, P70

[3] DRUCKSYNTHESE VON NIOBNITRIDEN UND KONSTITUTION VON DELTA-NBN [J].

BRAUER, G ;

KIRNER, H .

ZEITSCHRIFT FUR ANORGANISCHE UND ALLGEMEINE CHEMIE, 1964, 328 (1-2) :34-43

[4]

Cherrington B., 1982, PLASMA CHEM PLASMA P, V2, P113, DOI [10.1007/BF00633129, DOI 10.1007/BF00633129]

[5] SPECTROSCOPIC DIAGNOSTICS OF RF DISCHARGES AT MODERATE PRESSURE AND CHEMICAL APPLICATIONS .1. PURE NITROGEN [J].

CRAMAROSSA, F ;

FERRARO, G ;

MOLINARI, E .

JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1974, 14 (06) :419-436

[6] GENERAL RELATIONSHIP FOR THERMAL OXIDATION OF SILICON [J].

DEAL, BE ;

GROVE, AS .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3770-&

[7]

GETTERER J, 1975, MONATSH CHEM, V106, P1137

[8]

GUARD RW, 1967, T METALL SOC AIME, V239, P643

[9]

KJARISOV SS, 1972, NITRIDING REFRACTORY

[10]

Lynch J.F., 1966, ENG PROPERTIES SELEC

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