QUANTIFYING DATA FROM AUGER-SPECTRA AND IMAGES

A method for quantifying Auger spectra and including matrix effects is described. This method corrects iteratively for the effects of electron back-scattering, the inelastic mean free path and atomic density in the sample using established methods. New algorithms have been developed to assist the user interactively with the analysis of spectra collected from surfaces covered by thin films of unknown composition or thickness, or by coverage of another material. Error analysis has been included for both homogeneous and thin film cases. A 'figure of merit', used to inform the user if a thin film model of the surface is accurate, is introduced. The algorithms can be implemented on a small microcomputer.