CHANNELING STUDIES OF DEPTH OF DAMAGE PRODUCED IN LINBO3 BY 50-1100 KEV HE-4+ IMPLANTATIONS

被引：17

作者：

BARFOOT, KM

WEISS, BL

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1984年 / 17卷 / 03期

关键词：

D O I：

10.1088/0022-3727/17/3/002

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L47 / L52

页数：6

共 17 条

[1]

[Anonymous], 1977, STOPPING RANGES IONS

[2] CHANNELING EFFECTS IN ENERGY LOSS OF 3-11-MEV PROTONS IN SILICON AND GERMANIUM SINGLE CRYSTALS [J].

APPLETON, BR ;

ERGINSOY, C ;

GIBSON, WM .

PHYSICAL REVIEW, 1967, 161 (02) :330-&

[3] CHARACTERIZATION OF (TI0.65NB0.35)O2 COMPOUND AS A SOURCE FOR TI DIFFUSION DURING TI-LINBO3 OPTICAL-WAVEGUIDES FABRICATION [J].

ARMENISE, MN ;

CANALI, C ;

DESARIO, M ;

CARNERA, A ;

MAZZOLDI, P ;

CELOTTI, G .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (01) :62-70

[4] O-16(P,GAMMA) F-17 DIRECT CAPTURE CROSS-SECTION WITH AN EXTRAPOLATION TO ASTROPHYSICAL ENERGIES [J].

CHOW, HC ;

GRIFFITHS, GM ;

HALL, TH .

CANADIAN JOURNAL OF PHYSICS, 1975, 53 (17) :1672-1686

[5]

Chu WK., 1978, BACKSCATTERING SPECT

[6] FORMATION OF WAVE-GUIDES AND MODULATORS IN LINBO3 BY ION-IMPLANTATION [J].

DESTEFANIS, GL ;

GAILLIARD, JP ;

LIGEON, EL ;

VALETTE, S ;

FARMERY, BW ;

TOWNSEND, PD ;

PEREZ, A .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (12) :7898-7905

[7]

FAIK A, 1982, RADIAT EFF DEFECT S, V64, P235

[8] ION-IMPLANTATION INTO LINBO3 [J].

GOTZ, G ;

KARGE, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :1079-1088

[9] DISORDER PRODUCTION AND ANNEALING DURING HE ION RBS/CHANNELLING ANALYSIS OF INP [J].

HE, ZT ;

CARTER, G .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 77 (1-2) :97-105

[10]

JEYNES C, 1983, I PHYS M ATOMIC COLL

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