EFFECT OF DEPOSITION PARAMETERS ON THE MICROSTRUCTURE OF CHEMICALLY VAPOUR-DEPOSITED SNO2 FILMS

被引:24
作者
MURTY, NS
JAWALEKAR, SR
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D O I
10.1016/0040-6090(83)90046-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:283 / 289
页数:7
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