PULSED ION-BEAMS FOR MODIFICATION OF METAL-SURFACE PROPERTIES

被引：24

作者：

FOMINSKII, VY

MARKEEV, AM

NEVOLIN, VN

机构：

[1] Moscow Engineering Physics Institute

来源：

VACUUM | 1991年 / 42卷 / 1-2期

关键词：

D O I：

10.1016/0042-207X(91)90081-S

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A versatile technique using pulsed laser-plasma ion source (PLPIS) was developed for various ion beam treatments of materials (ion implantation, ion beam mixing, and ion beam assisted deposition). © 1990.

引用

页码：73 / 74

页数：2

共 4 条

[1]

Baglin J.E.E., 1987, ION BEAM MODIFICATIO

[2]

BIKOVSKII YA, 1985, LASER MASS SPECTROME

[3] DEVELOPMENT OF INDUSTRIAL ION-IMPLANTATION AND ION ASSISTED COATING PROCESSES - A PERSPECTIVE [J].

LEGG, KO ;

SOLNICKLEGG, H .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 40-1 :562-566

[4] ION-BEAM ASSISTED DEPOSITION FOR METAL-FINISHING [J].

WOLF, GK ;

BARTH, M ;

ENSINGER, W .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 37-8 :682-687

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