IMPORTANCE OF DEFECTS AND DOPANT NATURE IN ALKALI-METAL III-V-SEMICONDUCTOR INTERFACE FORMATION AND PROMOTED OXIDATION

被引:5
作者
SCHIRM, KM
SOUKIASSIAN, P
MANGAT, PS
HURYCH, Z
SOONCKINDT, L
BONNET, JJ
机构
[1] UNIV PARIS 11,DEPT PHYS,F-91405 ORSAY,FRANCE
[2] NO ILLINOIS UNIV,DEPT PHYS,DE KALB,IL 60115
[3] UNIV MONTPELLIER 2,ETUD SURFACES INTERFACES & COMPOSANTS LAB,F-34095 MONTPELLIER 5,FRANCE
基金
美国国家科学基金会;
关键词
D O I
10.1016/0169-4332(93)90263-B
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The room-temperature oxidation of p- and n-type GaSb(110) surfaces modified by a sodium or a rubidium overlayer is investigated by means of core-level and valence-band photoemission spectroscopy using synchrotron radiation. The oxidation rate of the GaSb(110) is increased by nearly 6 orders of magnitude in the presence of the alkali-metal adsorbate. This results in the formation of mixed Ga2O3 and Sb2O5 oxides. A complete oxidation of the GaSb(110) surface only occurs when a strong reaction between the alkali overlayer and the substrate takes place, which indicates that defects play a central role in the reaction similarly to the previously observed case of alkali-metal-promoted nitridation of other III-V semiconductor surfaces. This behavior is very different from the one observed in the case of alkali-metal-promoted oxidation or nitridation of elemental semiconductors such as silicon where no reaction between the adsorbate and the substrate occurs. Interestingly, the p-type (Zn doped) surfaces were, in general, found to be more reactive than the n-type (Te doped) ones, which suggests that the nature of the dopant might also play some role in the formation of reactive interfaces. The results indicate that surface defects seem to play an important role in alkali-metal-promoted reactions of III-V compound semiconductors.
引用
收藏
页码:417 / 425
页数:9
相关论文
共 27 条
[1]   INTERACTION OF OXYGEN WITH SILICON D-METAL INTERFACES - A PHOTOEMISSION INVESTIGATION [J].
ABBATI, I ;
ROSSI, G ;
CALLIARI, L ;
BRAICOVICH, L ;
LINDAU, I ;
SPICER, WE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :409-412
[2]   THE ROLE OF A SUPEROXO-LIKE SPECIES IN THE OXIDATION OF ALKALI METAL-PRECOVERED GAAS(100) SURFACES [J].
ARAGHIKOZAZ, H ;
BROJERDI, G ;
BESANCON, M ;
DOLLE, P ;
JUPILLE, J .
SURFACE SCIENCE, 1991, 251 :1091-1095
[3]   NA-PROMOTED OXIDATION OF SI(111) [J].
BOISHIN, G ;
TIKHOV, M ;
SURNEV, L .
SURFACE SCIENCE, 1991, 257 (1-3) :190-198
[4]   CATALYTIC ACTION OF GOLD ATOMS ON THE OXIDATION OF SI(111) SURFACES [J].
CROS, A ;
DERRIEN, J ;
SALVAN, F .
SURFACE SCIENCE, 1981, 110 (02) :471-490
[5]   SILICON SURFACES - METALLIC CHARACTER, OXIDATION AND ADHESION [J].
CROS, A .
JOURNAL DE PHYSIQUE, 1983, 44 (06) :707-711
[6]  
DERRIEN J, 1983, SURF SCI LETT, V124, pL235
[7]  
EASTMAN DE, 1980, PHYS REV LETT, V45, P656, DOI 10.1103/PhysRevLett.45.656
[8]  
GUICHAR GM, 1977, 7TH P INT VAC C 3RD, P632
[9]   REACTIONS AT THE GD-SI(111)7X7 INTERFACE - PROMOTION OF SI OXIDATION [J].
HENLE, WA ;
RAMSEY, MG ;
NETZER, FP ;
CIMINO, R ;
BRAUN, W ;
WITZEL, S .
PHYSICAL REVIEW B, 1990, 42 (17) :11073-11078
[10]  
HIRAKI A, 1983, SURF SCI REP, V3, P355