共 20 条
[13]
MICHL J, 1988, ACS S SERIES, V360, pCH5
[14]
Miller R. D., 1988, SILICON CHEM
[16]
SCHELLENBERG FM, 1988, UNPUB INT C QUANT EL
[18]
WEST R, 1986, J ORGANOMET CHEM, V300, P329
[20]
ZEIGLER JM, 1985, SPIE ADV RESIST TECH, V2, P167