NEW PIEZOELECTRIC TA2O5 THIN-FILMS

被引：24

作者：

NAKAGAWA, Y

GOMI, Y

机构：

[1] Yamanashi Univ, Faculty of, Engineering, Kofu, Jpn, Yamanashi Univ, Faculty of Engineering, Kofu, Jpn

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 02期

关键词：

D O I：

10.1063/1.95712

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

PIEZOELECTRIC MATERIALS

引用

页码：139 / 140

页数：2

共 8 条

[1]

Berry R.W., 1968, THIN FILM TECHNOLOGY

[2]

HENSLER DH, 1971, APPL OPTICS, V14, P1037

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KINO, GS ;

WAGERS, RS .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1480-1488

[4] INTERACTION OF LIGHT AND ULTRASONIC SURFACE WAVES [J].

MAYER, WG ;

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AUTH, DC .

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[5] SPUTTERED TA2O5 ANTIREFLECTION COATINGS FOR SILICON SOLAR-CELLS [J].

RUBIO, F ;

DENIS, J ;

ALBELLA, JM ;

MARTINEZDUART, JM .

THIN SOLID FILMS, 1982, 90 (04) :405-408

[6] ANALYSIS OF INTERDIGITAL SURFACE WAVE TRANSDUCER BY USE OF AN EQUIVALENT CIRCUIT MODEL [J].

SMITH, WR ;

GERARD, HM ;

COLLINS, JH ;

REEDER, TM ;

SHAW, HJ .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1969, MT17 (11) :856-+

[7] STRUCTURE DES OXIDES DE TANTALE [J].

TERAO, N .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1967, 6 (01) :21-&

[8] REFRACTIVE-INDEX-ADJUSTABLE SIO2-TA2O5 FILMS FOR INTEGRATED OPTICAL CIRCUITS [J].

TERUI, H ;

KOBAYASHI, M .

APPLIED PHYSICS LETTERS, 1978, 32 (10) :666-668

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