REFRACTIVE-INDEX-ADJUSTABLE SIO2-TA2O5 FILMS FOR INTEGRATED OPTICAL CIRCUITS

被引：65

作者：

TERUI, H

KOBAYASHI, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 32卷 / 10期

关键词：

D O I：

10.1063/1.89848

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：666 / 668

页数：3

共 11 条

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APPLIED OPTICS, 1973, 12 (04) :737-742

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HENSLER, DH ;

CUTHBERT, JD ;

MARTIN, RJ ;

TIEN, PK .

APPLIED OPTICS, 1971, 10 (05) :1037-+

[3] VARIABLE REFRACTIVE-INDEX AND BIREFRINGENT WAVEGUIDES BY SPUTTERING TANTALUM IN O2-N2 MIXTURES [J].

INGREY, SJ ;

WESTWOOD, WD ;

CHENG, YC ;

WEI, J .

APPLIED OPTICS, 1975, 14 (09) :2194-2198

[4]

KITTEL C, 1971, INTRO SOLID STATE P, P461

[5]

LSHITANI A, 1976, APPL PHYS LETT, V29, P289

[6] SILICON OXYNITRIDE FILMS ON FUSED SILICA FOR OPTICAL WAVEGUIDES [J].

RAND, MJ ;

STANDLEY, RD .

APPLIED OPTICS, 1972, 11 (11) :2482-+

[7] LIGHT WAVES IN THIN FILMS AND INTEGRATED OPTICS [J].

TIEN, PK .

APPLIED OPTICS, 1971, 10 (11) :2395-&

[8] THIN ORGANOSILICON FILMS FOR INTEGRATED OPTICS [J].

TIEN, PK ;

SMOLINSKY, G ;

MARTIN, RJ .

APPLIED OPTICS, 1972, 11 (03) :637-+

[9] INTEGRATED-OPTICS AND NEW WAVE PHENOMENA IN OPTICAL-WAVEGUIDES [J].

TIEN, PK .

REVIEWS OF MODERN PHYSICS, 1977, 49 (02) :361-420

[10] MEASUREMENT OF THIN-FILM PARAMETERS WITH A PRISM COUPLER [J].

ULRICH, R ;

TORGE, R .

APPLIED OPTICS, 1973, 12 (12) :2901-2908

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