SILICON OXYNITRIDE FILMS ON FUSED SILICA FOR OPTICAL WAVEGUIDES

[1] Abeles F., 1967, ADV OPTICAL TECHNIQU, P143

[2] PROPERTIES OF SIXOYNZ FILMS ON SI [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) : 311 - &

[3] CAPILLARITY-INDUCED SMOOTHING OF GLASS SURFACES BY VISCOUS FLOW [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (03) : 161 - &

[4] A LOW-STRESS INSULATING FILM ON SILICON BY CHEMICAL VAPOR DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (09) : 4458 - &

[5] FRENCH WG, 1970, CERAM B, V49, P974

[6] INTEGRATED OPTICAL CIRCUITS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (10): : 1504 - +

[7] SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3445 - +

[8] OPTICAL STUDIES OF THIN FILMS ON SURFACES OF FUSED QUARTZ [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1970, 74 (14) : 2742 - +

[9] OPTICAL WAVEGUIDE SCATTERING AND GRIFFITH MICROCRACKS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (07): : 1123 - &

[10] HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193

[1] Abeles F., 1967, ADV OPTICAL TECHNIQU, P143

[2] PROPERTIES OF SIXOYNZ FILMS ON SI [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (03) : 311 - &

[3] CAPILLARITY-INDUCED SMOOTHING OF GLASS SURFACES BY VISCOUS FLOW [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (03) : 161 - &

[4] A LOW-STRESS INSULATING FILM ON SILICON BY CHEMICAL VAPOR DEPOSITION [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (09) : 4458 - &

[5] FRENCH WG, 1970, CERAM B, V49, P974

[6] INTEGRATED OPTICAL CIRCUITS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1970, 58 (10): : 1504 - +

[7] SPUTTERED GLASS WAVEGUIDE FOR INTEGRATED OPTICAL CIRCUITS [J]. BELL SYSTEM TECHNICAL JOURNAL, 1969, 48 (10): : 3445 - +

[8] OPTICAL STUDIES OF THIN FILMS ON SURFACES OF FUSED QUARTZ [J]. JOURNAL OF PHYSICAL CHEMISTRY, 1970, 74 (14) : 2742 - +

[9] OPTICAL WAVEGUIDE SCATTERING AND GRIFFITH MICROCRACKS [J]. PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1971, 59 (07): : 1123 - &

[10] HEAVENS OS, 1964, PHYS THIN FILMS, V2, P193