BINARY COLLISIONS INDUCING CHEMICAL-REACTIONS IN 2 KEV AR+ SPUTTERING OF ZR AND TI PHOSPHATES

被引：10

作者：

PIGNATARO, S

MARLETTA, G

PUGLISI, O

机构：

来源：

CHEMICAL PHYSICS | 1985年 / 97卷 / 2-3期

关键词：

D O I：

10.1016/0301-0104(85)87050-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：421 / 431

页数：11

共 32 条

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