THIN ORGANIC FILMS PRODUCED BY ION-IMPLANTATION

被引：9

作者：

CALCAGNO, L

SHENG, KL

TORRISI, L

FOTI, G

机构：

来源：

关键词：

D O I：

10.1063/1.94908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：761 / 763

页数：3

共 8 条

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[2] [Anonymous], COMMUNICATION
[3] ION-BEAM LITHOGRAPHY
BROWN, WL
VENKATESAN, T
WAGNER, A
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 157 - 168
[4] LARGE CONDUCTIVITY CHANGES IN ION-BEAM IRRADIATED ORGANIC THIN-FILMS
FORREST, SR
KAPLAN, ML
SCHMIDT, PH
VENKATESAN, T
LOVINGER, AJ
[J]. APPLIED PHYSICS LETTERS, 1982, 41 (08) : 708 - 710
[5] CHEMICAL EFFECTS INDUCED BY ION-IMPLANTATION IN MOLECULAR-SOLIDS
FOTI, G
CALCAGNO, L
PUGLISI, O
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY): : 87 - 96
[6] KRUTZ R, 1980, PHYS REV A, V22, P6
[7] MAYER JW, 1977, ION BEAM HDB MATERIA
[8] VENKATESAN T, 1983, J APPL PHYS, V54, P6