ION-BOMBARDMENT OF RESISTS

被引：53

作者：

ADESIDA, I ^{[1
]}

机构：

[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 209卷 / MAY期

关键词：

The author wishes to acknowledge fruitful discussions with Professors E.D. Wolf and C.A. Lee; and with Dr. L. Karapiperis. The technical contributions of R. Tiberio; B; Whitehead; M; Skvarla; and C. Anderson are gratefully acknowledged. Thanks are also due to H. Rettig for the preparation of this manuscript. This work was supported in part by a grant from the International Business Machines Corporation; and by the National Science Foundation through grant no. 77-09688 to the National Research and Resource Facility for Submicron Structures;

D O I：

10.1016/0167-5087(83)90785-8

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：79 / 86

页数：8

共 34 条

[1] MONTE-CARLO SIMULATION OF ION-BEAM PENETRATION IN SOLIDS
ADESIDA, I
KARAPIPERIS, L
[J]. RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 61 (3-4): : 223 - 233
[2] DRY DEVELOPMENT OF ION-BEAM EXPOSED PMMA RESIST
ADESIDA, I
CHINN, JD
RATHBUN, L
WOLF, ED
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02): : 666 - 671
[3] ADESIDA I, UNPUB
[4] RANGE AND STRAGGLE OF BORON IN PHOTORESIST
BACCARANI, G
PICKAR, KA
[J]. SOLID-STATE ELECTRONICS, 1972, 15 (02) : 239 - +
[5] MASKED ION-BEAM LITHOGRAPHY - A FEASIBILITY DEMONSTRATION FOR SUBMICROMETER DEVICE FABRICATION
BARTELT, JL
SLAYMAN, CW
WOOD, JE
CHEN, JY
MCKENNA, CM
MINNING, CP
COAKLEY, JF
HOLMAN, RE
PERRYGO, CM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1166 - 1171
[6] Bowden M J, 1979, CRC CRIT R SOLID ST, V8, P223
[7] RESOLUTION, OVERLAY, AND FIELD SIZE FOR LITHOGRAPHY SYSTEMS
BROERS, AN
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1981, 28 (11) : 1268 - 1278
[8] BROWN WL, 1981, SOLID STATE TECHNOL, V24, P60
[9] INORGANIC RESIST FOR DRY PROCESSING AND DOPANT APPLICATIONS
CHANG, MS
HOU, TW
CHEN, JT
KOLWICZ, KD
ZEMEL, JN
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06): : 1973 - 1976
[10] Charlesby A., 1960, ATOMIC RAD POLYM

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