DECARBONIZATION BY USING ECR PLASMA

被引：3

作者：

ISHIBE, Y ^{[1
]}

KOKAI, H ^{[1
]}

OYAMA, H ^{[1
]}

SAKAMOTO, Y ^{[1
]}

机构：

[1] TOYO UNIV,FAC ENGN,KAWAGOE,SAITAMA 356,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 04期

关键词：

D O I：

10.1143/JJAP.27.663

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：663 / 665

页数：3

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