ON-CHIP CAPACITANCE MEASUREMENT CIRCUITS IN VSLI STRUCTURES

被引:10
作者
IWAI, H
KOHYAMA, S
机构
关键词
D O I
10.1109/T-ED.1982.20924
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1622 / 1626
页数:5
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