SUBMICROMETER PERIODICITY GRATINGS AS ARTIFICIAL ANISOTROPIC DIELECTRICS

被引：191

作者：

FLANDERS, DC

机构：

来源：

关键词：

D O I：

10.1063/1.93979

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：492 / 494

页数：3

共 8 条

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[3] X-RAY-LITHOGRAPHY AT - 100-A LINEWIDTHS USING X-RAY MASKS FABRICATED BY SHADOWING TECHNIQUES
FLANDERS, DC
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[6] ULTRAVIOLET GRATING POLARIZERS
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (04) : 438 - 448
[8] YEH P, 1981, P SOC PHOTO-OPT INST, V307, P13