APPLICATION OF ALMOST-EQUAL-TO 100 A LINEWIDTH STRUCTURES FABRICATED BY SHADOWING TECHNIQUES

被引：46

作者：

FLANDERS, DC ^{[1
]}

WHITE, AE ^{[1
]}

机构：

[1] HARVARD UNIV,CAMBRIDGE,MA 02138

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 19卷 / 04期

关键词：

D O I：

10.1116/1.571229

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：892 / 896

页数：5

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