REPRODUCIBLE TEMPERATURE-MEASUREMENT OF GAAS SUBSTRATES DURING MOLECULAR-BEAM EPITAXIAL-GROWTH

被引:14
作者
WRIGHT, SL
MARKS, RF
WANG, WI
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 02期
关键词
D O I
10.1116/1.583410
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:505 / 506
页数:2
相关论文
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