ADVANCED ION-BEAM PROCESSING PROJECTS IN JAPAN

被引：2

作者：

YAMADA, I

机构：

[1] Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷

关键词：

D O I：

10.1016/0168-583X(91)95854-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Recent advanced ion beam processing projects in Japan are reviewed. In this review, R&D projects of ion beam technology and processing technology by AMMTRA (Advanced Material-processing and Machining Technology Research Association), the establishment of an ion beam center corporation by NEDO (New Energy and Industrial Technology Development Organization) and other organizations, and some of the research on priority areas from the Ministry of Education will be reviewed. The projects include R&D of ion beam equipments in a wide range of applications, new ion beam process technologies, and specific applications.

引用

页码：1467 / 1475

页数：9

共 13 条

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