共 16 条
[2]
BUCHMANN P, 1988, MICROCIRCUIT ENG, V9, P485
[3]
MIGRATION AND GETTERING OF SI, BERYLLIUM, AND AMBIENT-RELATED O IN ALGAAS/GAAS LASER STRUCTURES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1992, 10 (02)
:807-811
[6]
Hafizi M. E., 1990, 12th Annual GaAs IC Symposium. Technical Digest 1990 (Cat. No.90CH2889-4), P329, DOI 10.1109/GAAS.1990.175521
[7]
Holt D. B., 1989, SEM MICROCHARACTERIZ, P241
[10]
JAKUBOWICZ A, IN PRESS C P I PHYS