IN-SITU SEM OBSERVATIONS OF ELECTROMIGRATION VOIDS IN AL LINES UNDER PASSIVATION

被引：2

作者：

FLINN, PA ^{[1
]}

MADDEN, MC ^{[1
]}

MARIEB, TN ^{[1
]}

机构：

[1] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305

来源：

MRS BULLETIN | 1994年 / 19卷 / 06期

关键词：

D O I：

10.1557/S0883769400036770

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：51 / 55

页数：5

共 16 条

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FLINN, P ;

MADDEN, M .

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[8] EXPERIMENTAL-STUDY OF ELECTROMIGRATION IN BICRYSTAL ALUMINUM LINES [J].

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[9]

LONGWORTH HP, 1992, MATER RES SOC SYMP P, V265, P95, DOI 10.1557/PROC-265-95

[10]

MADDEN MC, 1992, MATER RES SOC SYMP P, V265, P33, DOI 10.1557/PROC-265-33

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