GAAS/(GA,AL)AS HETEROJUNCTION BIPOLAR-TRANSISTORS WITH BURIED OXYGEN-IMPLANTED ISOLATION LAYERS

被引:1
作者
ASBECK, PM [1 ]
MILLER, DL [1 ]
ANDERSON, RJ [1 ]
EISEN, FH [1 ]
机构
[1] ROCKWELL INT CORP,CTR MICROELECTR RES & DEV,THOUSAND OAKS,CA 91360
关键词
D O I
10.1109/T-ED.1984.21871
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1979 / 1979
页数:1
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[3]  
Ning T. H., 1980, International Electron Devices Meeting. Technical Digest, P823