QUANTITATIVE SPUTTERING

被引：62

作者：

ZALM, PC

机构：

来源：

关键词：

D O I：

10.1002/sia.740110102

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：1 / 24

页数：24

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