STRESS RELIEF FORMS OF DIAMOND-LIKE CARBON THIN-FILMS UNDER INTERNAL COMPRESSIVE STRESS

被引：116

作者：

NIR, D

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(84)90500-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：41 / 49

页数：9

共 21 条

[1] A REVIEW OF RECENT WORK ON HARD I-C FILMS [J].

ANDERSSON, LP .

[2] ADHESION OF METALS TO CRYSTAL FACES [J].

BENJAMIN, P ;

WEAVER, C .

[3] ADHESION OF METAL FILMS TO GLASS [J].

BENJAMIN, P ;

WEAVER, C .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277) :177-&

[4] MEASUREMENT OF ADHESION OF THIN FILMS [J].

BENJAMIN, P ;

WEAVER, C .

PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1960, 254 (1277) :163-176

[5]

Chajes A., 1974, PRINCIPLES STRUCTURA

[6]

Chapman B., 1980, GLOW DISCHARGE PROCE

[7]

Chopra K.L, 1969, THIN FILM PHENOMENA

ENKE, K .

[9]

GOULD PL, 1977, STATIC ANAL SHELLS

[10] MICROMECHANICS OF FILMS, FIBRILS AND INTERFACES - AN OVERVIEW [J].

HOFFMAN, RW .