CR-SI-O FILM WITH A HIGH CHROMIUM CONCENTRATION FOR STRAIN-GAUGE

被引：12

作者：

YAMADERA, H

TAGA, Y

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 11期

关键词：

D O I：

10.1063/1.101710

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1080 / 1081

页数：2

共 12 条

[1]

BOYER HE, 1984, METALS HDB, P2

[2] QUANTITATIVE FORMULATION OF RESISTANCE AND STRAIN-GAUGE FACTOR EXPRESSIONS FOR DISCONTINUOUS FILMS [J].

DELVECCHIO, RM ;

MEIKSIN, ZH .

THIN SOLID FILMS, 1979, 61 (01) :65-71

[3] EFFECT OF ELASTIC STRAIN ON THE ELECTRICAL RESISTANCE OF METALS [J].

KUCZYNSKI, GC .

PHYSICAL REVIEW, 1954, 94 (01) :61-64

[4] STUDY OF STABLE THIN-FILM PRESSURE AND STRAIN TRANSDUCER MATERIALS [J].

MEIKSIN, ZH ;

SHAH, KJ ;

STOLINSKI, EJ ;

MIRCHANDANI, RA ;

KUO, HB .

THIN SOLID FILMS, 1972, 12 (01) :85-+

[5] SEEBECK AND PIEZORESISTANCE EFFECTS IN AMORPHOUS MICROCRYSTALLINE MIXED-PHASE SILICON FILMS AND APPLICATIONS TO POWER SENSORS AND STRAIN-GAUGES [J].

NISHIDA, S ;

KONAGAI, M ;

TAKAHASHI, K .

THIN SOLID FILMS, 1984, 112 (01) :7-16

[6]

OZAKI Y, 1983, 9TH P INT VAC C 5TH, P153

[7] ELECTRICAL RESISTANCE-STRAIN CHARACTERISTICS OF THIN EVAPORATED METAL FILMS [J].

PARKER, RL ;

KRINSKY, A .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (09) :2700-&

[8] INHOMOGENEOUS INDIUM TIN OXIDE-FILMS PREPARED BY SPUTTERING WITH MULTIPLE TARGETS [J].

SAWADA, Y ;

TAGA, Y .

THIN SOLID FILMS, 1983, 110 (04) :L129-L132

[9] PIEZORESISTIVE PROPERTIES OF POLYCRYSTALLINE SILICON [J].

SETO, JYW .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) :4780-4783

[10] THE EFFECT OF COMPOSITION AND SHEET RESISTANCE ON THE STRAIN SENSITIVITY OF CR-SIO CERMET FILMS [J].

TAYLOR, AG ;

THURSTANS, RE ;

OXLEY, DP .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (09) :755-759

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