INHOMOGENEOUS INDIUM TIN OXIDE-FILMS PREPARED BY SPUTTERING WITH MULTIPLE TARGETS

被引：15

作者：

SAWADA, Y

TAGA, Y

机构：

来源：

THIN SOLID FILMS | 1983年 / 110卷 / 04期

关键词：

D O I：

10.1016/0040-6090(83)90511-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：L129 / L132

页数：4

相关论文

共 3 条

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THIN SOLID FILMS, 1983, 101 (01) :7-10

[2] PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].

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GUILLE, J ;

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THIN SOLID FILMS, 1981, 80 (1-3) :149-155