PROPERTIES OF AMORPHOUS-CARBON FILMS PRODUCED BY MAGNETRON SPUTTERING

被引：29

作者：

WYON, C

GILLET, R

LOMBARD, L

机构：

来源：

THIN SOLID FILMS | 1984年 / 122卷 / 03期

关键词：

D O I：

10.1016/0040-6090(84)90048-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：203 / 216

页数：14

相关论文

共 29 条

[1] ELECTRICAL CONDUCTION IN AMORPHOUS CARBON
ADKINS, CJ
FREAKE, SM
HAMILTON, EM
[J]. PHILOSOPHICAL MAGAZINE, 1970, 22 (175): : 183 - &
[2] ALNAIMI A, 1980, 8TH P INT VAC C CANN, P336
[3] A STUDY OF HETEROGENEOUS NIOBIUM CARBONITRIDE THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING
AUBERT, A
SPITZ, J
[J]. THIN SOLID FILMS, 1982, 96 (03) : 191 - 198
[4] Connell G. A. N., 1979, Amorphous semiconductors, P73
[5] STRUCTURE, OPTICAL-PROPERTIES AND DECOMPOSITION KINETICS OF SPUTTERED HYDROGENATED CARBON
CRAIG, S
HARDING, GL
[J]. THIN SOLID FILMS, 1982, 97 (04) : 345 - 361
[6] DESROUSSEAUX G, 1981, THIN SOLID FILMS, V76, P208
[7] SOME NEW RESULTS ON THE FABRICATION OF AND THE MECHANICAL, ELECTRICAL AND OPTICAL-PROPERTIES OF I-CARBON LAYERS
ENKE, K
[J]. THIN SOLID FILMS, 1981, 80 (1-3) : 227 - 234
[8] GRAPHITIZATION OF THIN CARBON-FILMS
GOMA, J
OBERLIN, M
[J]. THIN SOLID FILMS, 1980, 65 (02) : 221 - 232
[9] VARIABLE RANGE HOPPING IN A NONUNIFORM DENSITY OF STATES
HAMILTON, EM
[J]. PHILOSOPHICAL MAGAZINE, 1972, 26 (04): : 1043 - &
[10] ELECTRICAL, STRUCTURAL AND OPTICAL-PROPERTIES OF AMORPHOUS-CARBON
HAUSER, JJ
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 23 (01) : 21 - 41