SPUTTERING OF PTSI AND NISI

[1] ANDERSEN HH, 1975, 7TH YUG S PHYS ION G

[2] ANDERSEN N, 1974, KGL DAN VID SELSK MA, V39

[3] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[4] Northcliffe L. S., 1970, NUCL DATA A, V7, P233

[5] SIMULTANEOUS MEASUREMENT OF SPUTTERED CONSTITUENTS OF CU3AU [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) : 4997 - &

[6] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J]. APPLIED PHYSICS LETTERS, 1974, 24 (08) : 391 - 393

[7] STRUCTURE AND GROWTH KINETICS OF NI2SI ON SILICON [J]. THIN SOLID FILMS, 1975, 25 (02) : 403 - 413

[8] STOPPING OF HE-4 IONS IN ELEMENTAL MATTER [J]. THIN SOLID FILMS, 1973, 19 (02) : 281 - 287

[1] ANDERSEN HH, 1975, 7TH YUG S PHYS ION G

[2] ANDERSEN N, 1974, KGL DAN VID SELSK MA, V39

[3] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[4] Northcliffe L. S., 1970, NUCL DATA A, V7, P233

[5] SIMULTANEOUS MEASUREMENT OF SPUTTERED CONSTITUENTS OF CU3AU [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (12) : 4997 - &

[6] KINETICS AND MECHANISM OF PLATINUM SILICIDE FORMATION ON SILICON [J]. APPLIED PHYSICS LETTERS, 1974, 24 (08) : 391 - 393

[7] STRUCTURE AND GROWTH KINETICS OF NI2SI ON SILICON [J]. THIN SOLID FILMS, 1975, 25 (02) : 403 - 413

[8] STOPPING OF HE-4 IONS IN ELEMENTAL MATTER [J]. THIN SOLID FILMS, 1973, 19 (02) : 281 - 287