OBSERVATION OF FOURIER IMAGES IN SOFT-X-RAY RADIATION

被引:5
作者
ARISTOV, VV
AOKI, S
ERKO, AI
KIKUTA, S
MARTYNOV, VV
机构
[1] UNIV TSUKUBA,SAKURA,IBARAKI 305,JAPAN
[2] UNIV TOKYO,FAC ENGN,DEPT APPL PHYS,BUNKYO KU,TOKYO 113,JAPAN
关键词
D O I
10.1016/0030-4018(85)90087-2
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
IMAGING TECHNIQUES
引用
收藏
页码:223 / 225
页数:3
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ARISTOV VV, 1983, POVERKHNOST FIZIKA K, V12, P113
[2]  
Cowley J.M., 1975, DIFFRACTION PHYS, V1
[3]   SPATIAL PERIOD DIVISION - A NEW TECHNIQUE FOR EXPOSING SUB-MICROMETER-LINEWIDTH PERIODIC AND QUASI-PERIODIC PATTERNS [J].
FLANDERS, DC ;
HAWRYLUK, AM ;
SMITH, HI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1949-1952