CHEMICAL VAPOR-DEPOSITION OF SIC AND SOME OF ITS PROPERTIES

[1] GROWTH OF HETEROEPITAXIAL SIC FILMS BY PYROLYSIS OF VARIOUS ALKYL-SILICON COMPOUNDS [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) : 188 - 192

[2] BRENNFLECK K, 1984, 9TH P INT C CHEM VAP, P649

[3] REACTIVE PLASMA DEPOSITED SIXCYHZ FILMS [J]. THIN SOLID FILMS, 1979, 60 (02) : 193 - 200

[4] STRUCTURE OF CHEMICAL VAPOR-DEPOSITED SILICON-CARBIDE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 57 - 72

[5] PARAMETRIC STUDY OF SILICON-CARBIDE COATINGS DEPOSITED IN A FLUIDIZED-BED [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 89 - 96

[6] HOT HARDNESS OF SIC SINGLE-CRYSTAL [J]. JOURNAL OF MATERIALS SCIENCE, 1979, 14 (09) : 2253 - 2255

[7] Hirai T., 1983, Yogyo-Kyokai-Shi, V91, P502, DOI 10.2109/jcersj1950.91.1059_502

[8] SIC COATINGS FOR 1ST-WALL CANDIDATE MATERIALS BY RF SPUTTERING [J]. THIN SOLID FILMS, 1979, 63 (02) : 237 - 242

[9] DEPOSITION OF SILICON-CARBIDE COATINGS ON TITANIUM-ALLOY WITH A LOW-PRESSURE RF PLASMA [J]. THIN SOLID FILMS, 1980, 72 (03) : 497 - 501

[10] GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON [J]. APPLIED PHYSICS LETTERS, 1967, 11 (01) : 12 - +

[1] GROWTH OF HETEROEPITAXIAL SIC FILMS BY PYROLYSIS OF VARIOUS ALKYL-SILICON COMPOUNDS [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) : 188 - 192

[2] BRENNFLECK K, 1984, 9TH P INT C CHEM VAP, P649

[3] REACTIVE PLASMA DEPOSITED SIXCYHZ FILMS [J]. THIN SOLID FILMS, 1979, 60 (02) : 193 - 200

[4] STRUCTURE OF CHEMICAL VAPOR-DEPOSITED SILICON-CARBIDE [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 57 - 72

[5] PARAMETRIC STUDY OF SILICON-CARBIDE COATINGS DEPOSITED IN A FLUIDIZED-BED [J]. THIN SOLID FILMS, 1977, 40 (JAN) : 89 - 96

[6] HOT HARDNESS OF SIC SINGLE-CRYSTAL [J]. JOURNAL OF MATERIALS SCIENCE, 1979, 14 (09) : 2253 - 2255

[7] Hirai T., 1983, Yogyo-Kyokai-Shi, V91, P502, DOI 10.2109/jcersj1950.91.1059_502

[8] SIC COATINGS FOR 1ST-WALL CANDIDATE MATERIALS BY RF SPUTTERING [J]. THIN SOLID FILMS, 1979, 63 (02) : 237 - 242

[9] DEPOSITION OF SILICON-CARBIDE COATINGS ON TITANIUM-ALLOY WITH A LOW-PRESSURE RF PLASMA [J]. THIN SOLID FILMS, 1980, 72 (03) : 497 - 501

[10] GROWTH OF SINGLE-CRYSTAL FILMS OF CUBIC SILICON CARBIDE ON SILICON [J]. APPLIED PHYSICS LETTERS, 1967, 11 (01) : 12 - +