LAYER UNIFORMITY OBTAINED BY VACUUM EVAPORATION - APPLICATION TO FABRY-PEROT FILTERS

被引：11

作者：

GREZESBESSET, C

RICHIER, R

PELLETIER, E

机构：

来源：

APPLIED OPTICS | 1989年 / 28卷 / 14期

关键词：

D O I：

10.1364/AO.28.002960

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2960 / 2964

页数：5

共 12 条

[1]

Behrndt K. H., 1966, PHYS THIN FILMS, V3, P1

[2] AUTOMATIC-DETERMINATION OF THE OPTICAL-CONSTANTS OF INHOMOGENEOUS THIN-FILMS [J].

BORGOGNO, JP ;

LAZARIDES, B ;

PELLETIER, E .

APPLIED OPTICS, 1982, 21 (22) :4020-4029

[3] OPTICAL FILTERS - MONITORING PROCESS ALLOWING AUTO-CORRECTION OF THICKNESS ERRORS [J].

BOUSQUET, P ;

FORNIER, A ;

KOWALCZYK, R ;

PELLETIER, E ;

ROCHE, P .

THIN SOLID FILMS, 1972, 13 (02) :285-290

[4]

Fornier A., 1986, Proceedings of the SPIE - The International Society for Optical Engineering, V652, P27, DOI 10.1117/12.938354

[5]

FORNIER A, 1987, ANN TELECOMMUN, V42, P140

[6]

GREZESBESSET C, 1988, ANN TELECOMMUN, V43, P135

[7]

Holland L., 1952, VACUUM, V2, P346, DOI 10.1016/0042-207X(52)93784-6

[8] EFFECT OF ERRORS IN OPTICAL MONITORING OF NARROW-BAND ALL-DIELECTRIC THIN-FILM OPTICAL FILTERS [J].

MACLEOD, HA ;

RICHMOND, D .

OPTICA ACTA, 1974, 21 (06) :429-443

[9] THIN-FILM NARROW-BAND OPTICAL FILTERS [J].

MACLEOD, HA .

THIN SOLID FILMS, 1976, 34 (02) :335-342

[10] TURNING VALUE MONITORING OF NARROW-BAND ALL-DIELECTRIC THIN-FILM OPTICAL FILTERS [J].

MACLEOD, HA .

OPTICA ACTA, 1972, 19 (01) :1-&

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