HIGH-VOLTAGE MODULATOR FOR PULSED ION-IMPLANTATION

Pulsed ion implantation is a relatively new technique which under appropriate application should be economically superior to the conventional line of sight ion implantation process. Such a system requires a high voltage pulse modulator with certain specifications for its waveform. This paper describes a low cost and reliable high voltage pulse modulator whose design is based on R-C circuits and uses triggered spark-gaps for switching. Oscilloscope traces of the output pulse indicate the success of this design in fulfilling the waveform requirements. Furthermore, this pulse modulator was used in the pulse implantation of aluminum with nitrogen ions.