SELECTIVE DEPOSITION OF DIAMOND CRYSTALS BY CHEMICAL VAPOR-DEPOSITION USING A TUNGSTEN-FILAMENT METHOD

被引:105
作者
HIRABAYASHI, K [1 ]
TANIGUCHI, Y [1 ]
TAKAMATSU, O [1 ]
IKEDA, T [1 ]
IKOMA, K [1 ]
IWASAKIKURIHARA, N [1 ]
机构
[1] CANON INC,RES CTR,ATSUGI,KANAGAWA 24301,JAPAN
关键词
D O I
10.1063/1.99789
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1815 / 1817
页数:3
相关论文
共 12 条
  • [1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
    AISENBERG, S
    CHABOT, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
  • [2] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION
    ANGUS, JC
    WILL, HA
    STANKO, WS
    [J]. JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) : 2915 - &
  • [3] Bochko A. V., 1969, Soviet Physics - Doklady, V13, P748
  • [4] LPCVD OF TITANIUM DISILICIDE - SELECTIVITY OF GROWTH
    BOUTEVILLE, A
    ROYER, A
    REMY, JC
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8A) : 2080 - 2083
  • [5] Eversole W. G., 1962, US Patent, Patent No. [3,030,187, 3030187]
  • [6] EVERSOLE WG, 1884, Patent No. 303018
  • [7] ISHIZAKI A, UNPUB
  • [8] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE
    MATSUMOTO, S
    SATO, Y
    KAMO, M
    SETAKA, N
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04): : L183 - L185
  • [9] MATSUMOTO S, 1984, 39 NAT I RES IN MAT, P29
  • [10] CHARACTERIZATION OF HARD CARBON-FILMS BY ELECTRON-ENERGY LOSS SPECTROMETRY
    WEISSMANTEL, C
    BEWILOGUA, K
    SCHURER, C
    BREUER, K
    ZSCHEILE, H
    [J]. THIN SOLID FILMS, 1979, 61 (02) : L1 - L4