CLUSTER ION-SOURCE FOR MICROMACHINING

被引：6

作者：

HENKES, PRW

机构：

[1] Kernforschungszentrum Karlsruhe, Institut für Mikrostrukturtechnik, D-7500 Karlsruhe 1

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 01期

关键词：

D O I：

10.1063/1.1141293

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An ion source producing focused beams of accelerated carbon dioxide clusters is described, which improves on that used by us in previous work for structuring surfaces by sputtering.

引用

页码：360 / 362

页数：3

共 7 条

[1]

BUEHLER RJ, 1989, J PHYS, V50, P127

[2]

DUSEK H, 1956, HDB PHYSIQUE, V33, P145

[3]

HAGENA OF, 1976, 10TH P INT S RAR GAS, P1123

[4]

HENKES PRW, 1989, J PHYS-PARIS, V50, P159

[5]

HENKES PRW, IN PRESS VACUUM

[6] MASSENSPEKTROMETRISCHE UNTERSUCHUNG VON STRAHLEN AUS KONDENSIERTEM WASSERSTOFF [J].

HENKES, W .

ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE, 1962, A 17 (09) :786-&

[7] ENERGETIC CLUSTER IMPACTS ON THIN GOLD AND TANTALUM FILMS [J].

MATTHEW, MW ;

BEUHLER, RJ ;

LEDBETTER, M ;

FRIEDMAN, L .

JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (14) :3152-3159

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