ANALYTICAL TECHNIQUES WITH THE AUGER SCANNING ELECTRON-MICROSCOPE

被引：11

作者：

MOGAMI, A

机构：

[1] JEOL Ltd., 1418 Akishima, Tokyo, Nakagami

来源：

THIN SOLID FILMS | 1979年 / 57卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90418-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A spatial resolution down to 500 Å is one of the excellent features of the Auger scanning electron microscope. In this paper we describe various factors which determine the spatial resolution and two analytical techniques, beam brightness modulation and a computer control system, which contribute to improving the resolution and reducing the electron-induced specimen damage during analysis. © 1979.

引用

页码：127 / 139

页数：13

共 16 条

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