CHEMICAL ETCHING OF BERLINITE IN SULFURIC-ACID-SOLUTIONS

被引：5

作者：

CAMBON, O

GOIFFON, A

PHILIPPOT, E

机构：

[1] USTL Laboratoire de Physicochimie des matériaux, Montpellier Cedex, 34060, URA D 0407, Place Eugène Bataillon

来源：

JOURNAL OF MATERIALS SCIENCE | 1991年 / 26卷 / 03期

关键词：

D O I：

10.1007/BF00588326

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The aim of this work is to chemically etch AT wafers of berlinite AlPO4 in sulphuric acid solutions in order to reach a thickness previously chosen (manufacturing of high frequency plate resonators). The kinetics of etching is studied: the decrease of thickness is followed by frequency measurement. The influence of temperature and acid concentration is measured and the evolution of surface texture is checked both by roughness measurements, resonance frequency and scanning electron microscopy methods.

引用

页码：846 / 851

页数：6

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